@article {84,
	title = {Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors},
	journal = {Microelectronics Reliability},
	volume = {88-90},
	year = {2018},
	month = {Jan-09-2018},
	pages = {572 - 576},
	issn = {00262714},
	doi = {10.1016/j.microrel.2018.06.037},
	url = {https://linkinghub.elsevier.com/retrieve/pii/S0026271418304530https://api.elsevier.com/content/article/PII:S0026271418304530?httpAccept=text/xmlhttps://api.elsevier.com/content/article/PII:S0026271418304530?httpAccept=text/plain},
	author = {Tajalli, A. and Canato, E. and Nardo, A. and Meneghini, M. and Stockman, A. and Moens, P. and Zanoni, E. and Meneghesso, G.}
}
