@article {94,
	title = {Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures},
	journal = {Applied Physics Express},
	volume = {12},
	year = {2019},
	month = {Jan-06-2019},
	pages = {065501},
	issn = {1882-0778},
	doi = {10.7567/1882-0786/ab1ab8},
	author = {Uesugi, Kenjiro and Hayashi, Yusuke and Shojiki, Kanako and Miyake, Hideto}
}
