@article {95,
	title = {Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film},
	journal = {Journal of Crystal Growth},
	volume = {512},
	year = {2019},
	month = {Jan-04-2019},
	pages = {16 - 19},
	issn = {00220248},
	doi = {10.1016/j.jcrysgro.2019.02.001},
	author = {Tanaka, Shuichi and Shojiki, Kanako and Uesugi, Kenjiro and Hayashi, Yusuke and Miyake, Hideto}
}
