Local and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy

TitleLocal and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy
Publication TypeJournal Article
Year of Publication2019
AuthorsShojiki K, Hayashi Y, Uesugi K, Miyake H
JournalJapanese Journal of Applied Physics
Volume58
IssueSC
PaginationSCCB17
Date PublishedJan-06-2019
ISSN0021-4922
DOI10.7567/1347-4065/ab0d07
Short TitleJpn. J. Appl. Phys.