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Improvement mechanism of sputtered AlN films by high-temperature annealing
Title | Improvement mechanism of sputtered AlN films by high-temperature annealing |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Xiao S, Suzuki R, Miyake H, Harada S, Ujihara T |
Journal | Journal of Crystal Growth |
Volume | 502 |
Pagination | 41 - 44 |
Date Published | Jan-11-2018 |
ISSN | 00220248 |
DOI | 10.1016/j.jcrysgro.2018.09.002 |
Short Title | Journal of Crystal Growth |