Effect of thermal annealing on AlN films grown on sputtered AlN templates by metalorganic vapor phase epitaxy

TitleEffect of thermal annealing on AlN films grown on sputtered AlN templates by metalorganic vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2018
AuthorsYoshizawa R, Miyake H, Hiramatsu K
JournalJapanese Journal of Applied Physics
Volume57
Issue1S
Pagination01AD05
Date PublishedJan-01-2018
ISSN0021-4922
DOI10.7567/JJAP.57.01AD05
Short TitleJpn. J. Appl. Phys.