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Structural analysis of polarity inversion boundary in sputtered AlN films annealed under high temperatures
| Title | Structural analysis of polarity inversion boundary in sputtered AlN films annealed under high temperatures |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Akiyma T, Uchino M, Nakamura K, Ito T, Xiao S, Miyake H |
| Journal | Japanese Journal of Applied Physics |
| Volume | 58 |
| Issue | SC |
| Pagination | SCCB30 |
| Date Published | Jan-06-2019 |
| ISSN | 0021-4922 |
| DOI | 10.7567/1347-4065/ab0d01 |
| Short Title | Jpn. J. Appl. Phys. |
