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Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
| Title | Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Uesugi K, Hayashi Y, Shojiki K, Miyake H |
| Journal | Applied Physics Express |
| Volume | 12 |
| Issue | 6 |
| Pagination | 065501 |
| Date Published | Jan-06-2019 |
| ISSN | 1882-0778 |
| DOI | 10.7567/1882-0786/ab1ab8 |
| Short Title | Appl. Phys. Express |
