Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors

TitleImpact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors
Publication TypeJournal Article
Year of Publication2018
AuthorsTajalli A., Canato E., Nardo A., Meneghini M., Stockman A., Moens P., Zanoni E., Meneghesso G.
JournalMicroelectronics Reliability
Volume88-90
Pagination572 - 576
Date PublishedJan-09-2018
ISSN00262714
URLhttps://linkinghub.elsevier.com/retrieve/pii/S0026271418304530https://api.elsevier.com/content/article/PII:S0026271418304530?httpAccept=text/xmlhttps://api.elsevier.com/content/article/PII:S0026271418304530?httpAccept=text/plain
DOI10.1016/j.microrel.2018.06.037
Short TitleMicroelectronics Reliability